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1

Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling

De Groot, Peter, Colonna de Lega, Xavier, Liesener, Jan, Darwin, Michael

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 162 KB

english, 2008

2

Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry

de Groot, Peter, de Lega, Xavier Colonna

Journal:

Année:

2007

Langue:

english

Fichier:

PDF, 136 KB

english, 2007

3

Optical Interferometry for Measurement of the Geometric Dimensions of Industrial Parts

de Groot, Peter, Biegen, Jim, Clark, Jack, Colonna de Lega, Xavier, Grigg, David

Journal:

Année:

2002

Langue:

english

Fichier:

PDF, 1.38 MB

english, 2002

4

[OSA Optical Fabrication and Testing - Kohala Coast, Hawaii (2014..-..)] Classical Optics 2014 - Measuring High-Slope and Super-Smooth Optics with High-Dynamic-Range Coherence Scanning Interferometry

Fay, Martin F., Colonna de Lega, Xavier, de Groot, Peter

Année:

2014

Fichier:

PDF, 656 KB

2014

5

Deformation measurement with object-induced dynamic phase shifting

Colonna de Lega, Xavier, Jacquot, Pierre

Journal:

Année:

1996

Langue:

english

Fichier:

PDF, 1.22 MB

english, 1996

6

Determination of Fringe Order in White-Light Interference Microscopy

de Groot, Peter, Colonna de Lega, Xavier, Kramer, Jim, Turzhitsky, Michael

Journal:

Année:

2002

Langue:

english

Fichier:

PDF, 174 KB

english, 2002

7

Signal Modeling for Low-Coherence Height-Scanning Interference Microscopy

de Groot, Peter, Colonna de Lega, Xavier

Journal:

Année:

2004

Langue:

english

Fichier:

PDF, 293 KB

english, 2004

8

SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Wavelet Applications in Signal and Image Processing VII - Wavelet processing of interferometric signals and fringe patterns

Cherbuliez, Michel, Jacquot, Pierre M., Colonna de Lega, Xavier, Unser, Michael A., Aldroubi, Akram, Laine, Andrew F.

Année:

1999

Langue:

english

Fichier:

PDF, 3.18 MB

english, 1999

9

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 10 August 2008)] Interferometry XIV: Applications - Transparent film profiling and analysis by interference microscopy

de Groot, Peter J., Colonna de Lega, Xavier, Novak, Erik L., Osten, Wolfgang, Gorecki, Christophe

Année:

2008

Langue:

english

Fichier:

PDF, 331 KB

english, 2008

10

SPIE Proceedings [SPIE Photonics West '98 Electronic Imaging - San Jose, CA (Saturday 24 January 1998)] Practical Holography XII - Deformation analysis of a communication telescope structure under nonuniform heating using holographic interferometry

Jacquot, Pierre M., Lehmann, Mathias, Colonna de Lega, Xavier, Benton, Stephen A.

Année:

1998

Langue:

english

Fichier:

PDF, 4.11 MB

english, 1998

11

[AIP CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005 - Richardson, Texas (USA) (15-18 March 2005)] AIP Conference Proceedings - Optical Topography Measurement of Patterned Wafers

Colonna de Lega, Xavier

Année:

2005

Langue:

english

Fichier:

PDF, 322 KB

english, 2005

12

[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Interference Microscopy For Semiconductor Back End Patterning Metrology

de Lega, Xavier Colonna, Fay, Martin, Kruse, Ryan, Grigg, David, Darwin, Michael, Knowles, Matthew, Barnak, John, Wu, Maruko, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael

Année:

2009

Langue:

english

Fichier:

PDF, 2.97 MB

english, 2009

13

[OSA Optical Fabrication and Testing - Kohala Coast, Hawaii (2014..-..)] Classical Optics 2014 - Measuring High-Slope and Super-Smooth Optics with High-Dynamic-Range Coherence Scanning Interferometry

Fay, Martin F., Colonna de Lega, Xavier, de Groot, Peter

Année:

2014

Langue:

english

Fichier:

PDF, 656 KB

english, 2014

14

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] Optical Metrology in Production Engineering - Signal modeling for modern interference microscopes

de Groot, Peter J., Colonna de Lega, Xavier, Osten, Wolfgang, Takeda, Mitsuo

Année:

2004

Langue:

english

Fichier:

PDF, 93 KB

english, 2004

15

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

Grigg, David, Felkel, Eric, Roth, John, Colonna de Lega, Xavier, Deck, Leslie, de Groot, Peter J., Urey, Hakan, El-Fatatry, Ayman

Année:

2004

Langue:

english

Fichier:

PDF, 587 KB

english, 2004

16

SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Optical Inspection and Micromeasurements - Interferometric deformation measurement using object-induced dynamic phase-shifting

Colonna de Lega, Xavier, Jacquot, Pierre M., Gorecki, Christophe

Année:

1996

Langue:

english

Fichier:

PDF, 2.68 MB

english, 1996

17

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Interferometry XII: Applications - Surface profiling using a reference-scanning Mirau interference microscope

Colonna de Lega, Xavier, Grigg, David, de Groot, Peter, Osten, Wolfgang, Novak, Erik

Année:

2004

Langue:

english

Fichier:

PDF, 794 KB

english, 2004

18

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Interferometry XI: Applications - Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler

de Groot, Peter J., Colonna de Lega, Xavier, Grigg, David A., Osten, Wolfgang

Année:

2002

Langue:

english

Fichier:

PDF, 175 KB

english, 2002

19

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Interferometry XII: Techniques and Analysis - Aberration characterization using frequency domain analysis of low-coherence interferograms

Colonna de Lega, Xavier, Creath, Katherine, Schmit, Joanna

Année:

2004

Langue:

english

Fichier:

PDF, 309 KB

english, 2004

20

SPIE Proceedings [SPIE Photonics East (ISAM, VVDC, IEMB) - Boston, MA (Sunday 1 November 1998)] Three-Dimensional Imaging, Optical Metrology, and Inspection IV - Coherence scanning in a geometrically desensitized interferometer

Deck, Leslie L., de Groot, Peter J., Colonna de Lega, Xavier, Harding, Kevin G., Svetkoff, Donald J., Creath, Katherine, Harris, James S.

Année:

1998

Langue:

english

Fichier:

PDF, 352 KB

english, 1998

21

SPIE Proceedings [SPIE Photonics East (ISAM, VVDC, IEMB) - Boston, MA (Sunday 1 November 1998)] Three-Dimensional Imaging, Optical Metrology, and Inspection IV - Characterization of a geometrically desensitized interferometer for flatness testing

Colonna de Lega, Xavier, Biegen, James F., Stephenson, Dave, de Groot, Peter J., Harding, Kevin G., Svetkoff, Donald J., Creath, Katherine, Harris, James S.

Année:

1998

Langue:

english

Fichier:

PDF, 1.30 MB

english, 1998

22

SPIE Proceedings [SPIE Optics for Productivity in Manufacturing - Frankfurt, Federal Republic of Germany (Sunday 19 June 1994)] Optical Measurements and Sensors for the Process Industries - Common-path holographic interferometer for flatness testing

Jacquot, Pierre M., Colonna de Lega, Xavier, Boone, Pierre M., Gorecki, Christophe, Preater, Richard W. T.

Année:

1994

Langue:

english

Fichier:

PDF, 952 KB

english, 1994

23

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Interferometry XI: Techniques and Analysis - Interferometer design for writing Bragg gratings in optical fibers

de Groot, Peter J., Colonna de Lega, Xavier, Dawson, Jay W., MacDougall, Trevor W., Lu, Minfu, Troll, John R., Creath, Katherine, Schmit, Joanna

Année:

2002

Langue:

english

Fichier:

PDF, 178 KB

english, 2002

24

SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 19 July 1998)] Laser Interferometry IX: Applications - Adjustable coherence depth in a geometrically desensitized interferometer

de Groot, Peter J., Deck, Leslie L., Colonna de Lega, Xavier, Pryputniewicz, Ryszard J., Brown, Gordon M., Jueptner, Werner P. O.

Année:

1998

Langue:

english

Fichier:

PDF, 279 KB

english, 1998